30.06.2020 •

Advanced Optical Metrology: Thin Film Metrology

In this 43-page eBook, an overview on the use of laser scanning confocal microscopy in materials science is followed by three recent articles on the fabrication, characterization and applications of thin films.

Contents

3  Thin Film Metrology

9 The Use of Laser Scanning Confocal Microscopy (LSCM) in Materials Science

D.B. Hovis and A.H. Heuer

15    A Novel Slicing Method for Thin Supercapacitors

Hao Sun, Xuemei Fu, Songlin Xie et al.

22    Boosted UV Photodetection Performance in Chemically Etched Amorphous Gallium(III) Oxide Thin-Film Transistors

Zuyin Han, Huili Liang, Wenxing Huo et al.

29    Multiscale and Uniform Liquid Metal Thin-Film Patterning Based on Soft Lithography for 3D Heterogeneous Integrated Soft Microsystems: Additive Stamping and Subtractive Reverse Stamping

Min-gu Kim, Choongsoon Kim, Hommood Alrowais et al.

39    Scientific Publishing

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