25.06.2020 •

Thin Film Characterization

This brief introduction will discuss some of the techniques to characterize thin films. The methods are characterized by their distinct operating prin- ciples, namely mechanical characterization techniques, thermal analyses, scanning probe methods, and methods that involve the interaction of radiation (e.g., electrons, ions, and photons) with matter. The introduction will highlight laser scanning confocal microscopy as a promising method to characterize the morphology of a wide variety of thin-film materials.

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